Three-dimensional vertical one-time-programmable memory comprising Schottky diodes

ABSTRACT

The present invention discloses a three-dimensional vertical read-only memory (3D-OTP V ) comprising Schottky diodes. It comprises a plurality of vertical OTP strings formed side-by-side on a substrate circuit. Each OTP string is vertical to the substrate and comprises a plurality of vertically stacked OTP cells. Each OTP cell comprises an antifuse layer. A plurality of Schottky diodes are formed between the horizontal address lines and the vertical address lines.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation-in-part of “Three-Dimensional Vertical One-Time-Programmable Memory”, application Ser. No. 15/488,489, filed on Apr. 16, 2017, now U.S. Pat. No. 10,002,872, which claims priority from Chinese Patent Application 201610234999.5, filed on Apr. 16, 2016, in the State Intellectual Property Office of the People's Republic of China (CN), the disclosure of which is incorporated herein by reference in its entirety.

This application also claims priority from Chinese Patent Application 201810056753.2, filed on Jan. 22, 2018; Chinese Patent Application 201810072197.8, filed on Jan. 25, 2018; Chinese Patent Application 201810075105.1, filed on Jan. 26, 2018; in the State Intellectual Property Office of the People's Republic of China (CN), the disclosure of which are incorporated herein by references in their entireties.

BACKGROUND 1. Technical Field of the Invention

The present invention relates to the field of integrated circuit, and more particularly to one-time-programmable memory (OTP).

2. Prior Art

Three-dimensional one-time-programmable memory (3D-OTP) is a monolithic semiconductor memory. It comprises a plurality of vertically stacked OTP cells. In a conventional OTP, the OTP cells are formed on a two-dimensional (2-D) plane (i.e. on a semiconductor substrate). In contrast, the OTP cells of the 3D-OTP are formed in a three-dimensional (3-D) space. The 3D-OPT has a large storage density and a low storage cost. Because the 3D-OTP has a long data retention (>100 years), it is suitable for long-term data storage.

U.S. Pat. No. 5,838,396 issued to Zhang on Nov. 10, 1998 discloses a 3D-OTP. It comprises a semiconductor substrate and a plurality of OTP levels stacked above the semiconductor substrate. Transistors in the substrate and interconnects thereof form a substrate circuit (including the peripheral circuit of the 3D-OTP). Each OTP level comprises a plurality of address lines (including word lines and bit lines) and OTP cells. Each OTP level further comprises a plurality of OTP arrays. Each OTP array is a collection of all OTP cells which share at least one address line. Contact vias couple the address lines with the substrate circuit.

Because all address lines are horizontal, the 3D-OTP is a horizontal 3D-OTP (3D-OTP_(H)). When the storage capacity of the 3D-OTP_(H) exceeds 100 Gb, its minimum feature size goes to 1×nm. The formation of the 1×-nm feature size requires a high-precision lithography such as multiple patterning (e.g. double patterning, or quadruple patterning). This would increase the 3D-OTP cost. Furthermore, as more OTP levels are vertically stacked, planarization becomes more and more difficult. As a result, the 3D-OTP_(H) only comprises a small number of the OTP levels.

Objects and Advantages

It is a principle object of the present invention to provide a 3D-OTP with a large storage capacity.

It is a further object of the present invention to provide a 3D-OTP with a low storage cost.

It is a further object of the present invention to minimize the number of high-precision lithography steps during the manufacturing of the 3D-OTP.

It is a further object of the present invention to increase the number of the OTP levels in the 3D-OTP.

It is a further object of the present invention to provide a properly working 3D-OTP even with leaky OTP cells.

In accordance with these and other objects of the present invention, the present invention discloses a three-dimensional vertical one-time-programmable memory (3D-OTP_(V)).

SUMMARY OF THE INVENTION

The present invention discloses three-dimensional vertical one-time-programmable memory (3D-OTP_(V)). It comprises a plurality of vertical OTP strings formed side-by-side on the substrate circuit. Each OTP string is vertical to the substrate and comprises a plurality of vertically stacked OTP cells. To be more specific, the 3D-OTP_(V) comprises a plurality of vertically stacked horizontal address lines (word lines). After the memory holes penetrating these horizontal address lines are formed, the sidewall of each memory hole is covered with an antifuse layer before the memory hole is filled with at least a conductive material, which could be a metallic material or a doped semiconductor material. The conductive material in each memory hole forms a vertical address line (bit line). The OTP cells are formed at the intersections of the word lines and the bit lines.

Each OTP cell comprises an antifuse and a diode. The antifuse comprises an antifuse layer, which is a layer of insulating dielectric (e.g. silicon oxide, or silicon nitride) and is irreversibly switched from a high-resistance state to a low-resistance state during programming. In a multi-bit-per-cell 3D-OTP_(V), each OTP cell stores n (n>1) bits. It has N (N>2) states. The OTP cells in different states are programmed by different programming currents and therefore, have different resistance. The diode comprises a quasi-conductive layer (also known as diode layer, steering element, quasi-conduction layer, or other names in other patents and patent applications), which is broadly interpreted as any layer whose resistance at the read voltage (i.e. the read resistance) is substantially lower than when the applied voltage has a magnitude smaller than or polarity opposite to that of the read voltage.

In an OTP cell, the dimension of the diode's cathode is equal to the radius of the memory hole. Because this cathode is too small to suppress the leakage current of the diode, the OTP cell could be leaky. To address this issue, the present invention discloses a full-read mode. For the full-read mode, all OTP cells on a selected word line are read out during a read cycle. The read cycle includes two read phases: a pre-charge phase and a read-out phase. During the pre-charge phase, all address lines (including all word and all bit lines) in an OTP array are charged to a pre-determined voltage. During the read-out phase, after its voltage is raised to the read voltage V_(R), a selected word line starts to charge all bit lines through the associated OTP cells. By measuring the voltage change on the bit lines, the states of the associated OTP cells can be determined.

Accordingly, the present invention discloses a three-dimensional vertical read-only memory (3D-OTP_(V)), comprising: a semiconductor substrate comprising a substrate circuit; at least a vertical OTP string formed on said semiconductor circuit, said OTP string comprising a plurality of vertically stacked OTP cells coupled to a vertical address line; each of said OTP cells comprises an antifuse layer, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming.

The present invention further discloses a three-dimensional vertical read-only memory (3D-OTP_(V)), comprising: a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit; at least a memory hole through said plurality of horizontal address lines; an antifuse layer formed on the sidewall of said memory hole, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a vertical address line formed by filling at least a conductive material in said memory hole; an OTP string comprising a plurality of OTP cells formed at the intersections of said horizontal address lines and said vertical address line.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a z-x cross-sectional view of a first preferred 3D-OTP_(V); FIG. 1B is its x-y cross-sectional view along the cutline AA′;

FIGS. 2A-2C are cross-sectional views of the first preferred 3D-OTP_(V) at three manufacturing steps;

FIG. 3A is a z-x cross-sectional view of a second preferred 3D-OTP_(V); FIG. 3B is its x-y cross-sectional view along the cutline BB′;

FIG. 4A is a symbol of the OTP cell; FIG. 4B is a circuit block diagram of a first preferred read-out circuit for an OTP array; FIG. 4C is its signal timing diagram; FIG. 4D shows the current-voltage (I-V) characteristic of a preferred quasi-conductive layer;

FIG. 5A is a z-x cross-sectional view of a third preferred 3D-OTP_(V); FIG. 5B is its x-y cross-sectional view along the cutline CC′; FIG. 5C is a circuit block diagram of a second preferred read-out circuit for an OTP array;

FIG. 6 is a cross-sectional view of a multi-bit-per-cell 3D-OTP_(V).

It should be noted that all the drawings are schematic and not drawn to scale. Relative dimensions and proportions of parts of the device structures in the figures have been shown exaggerated or reduced in size for the sake of clarity and convenience in the drawings. The same reference symbols are generally used to refer to corresponding or similar features in the different embodiments. The symbol “/” means a relationship of “and” or “or”.

Throughout the present invention, the phrase “on the substrate” means the active elements of a circuit are formed on the surface of the substrate, although the interconnects between these active elements are formed above the substrate and do not touch the substrate; the phrase “above the substrate” means the active elements are formed above the substrate and do not touch the substrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Those of ordinary skills in the art will realize that the following description of the present invention is illustrative only and is not intended to be in any way limiting. Other embodiments of the invention will readily suggest themselves to such skilled persons from an examination of the within disclosure.

Referring now to FIG. 1A-1B, a first preferred three-dimensional vertical one-time-programmable memory (3D-OTP_(V)) is disclosed. FIG. 1A is its z-x cross-sectional view. It comprises a plurality of vertical OTP strings 1A, 1B . . . (shorthanded to OTP strings) formed side-by-side on the substrate circuit OK. Each OTP string (e.g. 1A) is vertical to the substrate 0 and comprises a plurality of vertically stacked OTP cells 1 aa-1 ha.

The preferred embodiment shown in this figure is an OTP array 10, which is a collection of all OT cells sharing at least an address line. It comprises a plurality of vertically stacked horizontal address lines (word lines) 8 a-8 h. After the memory holes 2 a-2 d penetrating these horizontal address lines 8 a-8 h are formed, the sidewalls of the memory holes 2 a-2 d are covered with an antifuse layer 6 a-6 d before the memory holes 2 a-2 d are filled with at least a conductive material, which could be a metallic material or a doped semiconductor material. The conductive material in

the memory holes 2 a-2 d form vertical address lines (bit lines) 4 a-4 d.

The OTP cells 1 aa-1 ha on the OTP string 1A are formed at the intersections of the word lines 8 a-8 h and the bit line 4 a. In the OTP cell 1 aa, the antifuse layer 6 a is a thin layer of insulating dielectric (e.g. silicon oxide, or silicon nitride). During programming, a conductive filament 11, which has a low resistance, is irreversibly formed therein. Except for the OTP cell 1 aa, the conductive filaments in other OTP cells are not drawn.

FIG. 1B is its x-y cross-sectional view along the cutline AA′. Each of the horizontal address lines (word lines) 8 a, 8 a′ is a conductive plate. The horizontal address line 8 a is coupled with eight vertical address lines (bit lines) 4 a-4 h. Eight OTP cells 1 aa-1 ah are formed at the intersections of the horizontal address 8 a and the vertical address lines 4 a-4 h. All OTP cells 1 aa-1 ah coupled with a single horizontal address line 8 a form an OTP-cell set 1 a. Because the horizontal address line 8 a is wide, it can be formed by a low-resolution photolithography (e.g. with feature size >60 nm).

Referring now to FIGS. 2A-2C, three manufacturing steps for the preferred 3D-OTP_(V) are shown. First of all, vertically stacked horizontal address-line layers 12 a-12 h are formed in continuously forming steps (FIG. 2A). To be more specific, after the substrate circuit OK (including transistors and the associated interconnects) are planarized, a first horizontal address-line layer 12 a is formed. The first horizontal address-line layer 12 a is just a plain layer of conductive materials and contains no patterns. Then a first insulating layer 5 a is formed on the first horizontal address-line layer 12 a. Similarly, the first insulating layer 5 a contains no patterns. Repeating the above process until alternate layers of the horizontal address-line layers and the insulating layers (a total of M layers) are formed. “Continuously forming steps” means that these forming steps (for the horizontal address-line layer and the insulating layer) are carried out continuously without any in-between pattern-transfer steps (including photolithography). Without any in-between pattern-transfer steps, excellent planarization can be achieve. As a result, the 3D-OTP_(V) comprising tens to hundreds of horizontal address-line layers can be formed. This is significantly more than the 3D-OPT_(H).

A first etching step is performed through all horizontal address-line layers 12 a-12 h to form a stack of horizontal address lines 8 a-8 h in (FIG. 2B). This is followed by a second etching step to form memory holes 2 a-2 d through all horizontal address lines 8 a-8 h (FIG. 2C). The sidewall of the memory holes 2 a-2 d is covered by an antifuse layers 6 a-6 d before the memory holes 2 a-2 d are filled with at least a conductive material to form the vertical address lines 4 a-4 d (FIG. 1A).

Referring now to FIG. 3A-3B, a second preferred 3D-OTP_(V) 10 is disclosed. FIG. 3A is its z-x cross-sectional view; FIG. 3B is its x-y cross-sectional view along the cutline BB′. It is similar to FIG. 1A-1B, except that each memory hole (e.g. 2 a) further comprises a quasi-conductive layer (e.g. 16 a). The quasi-conductive layer 16 a is the major component of a diode. It has the following properties: its resistance at the read voltage (read resistance) is substantially lower than when the applied voltage has a magnitude smaller than or polarity opposite to that of the read voltage. The quasi-conductive layers 16 a-16 d could be a ceramic layer (e.g. a metal-oxide layer). In this preferred embodiment, the quasi-conductive layers 16 a-16 d are formed between the sidewalls of the memory holes 2 a-2 d and the antifuse layers 6 a-6 d. Alternatively, the antifuse layers 6 a-6 d can be formed between the sidewalls of the memory holes 2 a-2 d and the quasi-conductive layer 16 a-16 d.

FIG. 4A is a symbol of the OTP cell 1. It means that the OTP cell 1 comprises an antifuse 12 and a diode 14. The antifuse 12 comprises the antifuse layer 6 a-6 d whose resistance is irreversibly switched from high to low during programming. The diode 14 comprises the quasi-conductive layer 16 a-16 d and can be broadly interpreted as any two-terminal device whose resistance at the read voltage is substantially lower than when the applied voltage has a magnitude smaller than or polarity opposite to that of the read voltage.

Exemplary diodes 14 include semiconductor diodes, Schottky diodes and ceramic diodes. For the semiconductor diodes 14, the horizontal address lines 8 a-8 h comprise a P+ semiconductor material, while the vertical address lines 4 a-4 d comprise an N+ semiconductor material. For the Schottky diodes 14, Schottky diodes 14 are formed between the horizontal address lines 8 a-8 h and the vertical address lines 4 a-4 d. In one preferred example, the horizontal address lines 8 a-8 h comprise at least a metallic material, while the vertical address lines 4 a-4 d comprise at least a doped semiconductor material. In another preferred example, the horizontal address lines 8 a-8 h comprise at least a doped semiconductor material, while the vertical address lines 4 a-4 d comprise at least a metallic material. For the ceramic diodes 14, ceramic layers (e.g. metal-oxide layers) separate the horizontal address lines 8 a-8 h from the b vertical address it lines 4 a-4 d.

In an OTP cell (e.g. 1 aa), the dimension of the diode's cathode is equal to the radius of the memory hole (e.g. 2 a). Because this cathode is too small to suppress the leakage current of the diode, the OTP cell could be leaky. To address this issue, the present invention discloses a full-read mode. For the full-read mode, all OTP cells on a selected word line are read out during a read cycle.

FIG. 4B discloses a first preferred read-out circuit for an OTP array 10. It runs in the full-read mode. In the language of electronic circuitry, the horizontal address lines 8 a-8 h are word lines, while the vertical address lines 4 a-4 h are bit lines. An OTP array 10 comprises the word lines 8 a-8 h, the bit lines 4 a-4 h, and the OTP cells 1 aa-1 ad . . . located at their intersections. Its peripheral circuits (located on the substrate 0 and is not part of the OTP array 10) comprise a multiplexor 40 and an amplifier 30. In this preferred embodiment, the multiplexor 40 is a 4-to-1 multiplexor.

FIG. 4C is its signal timing diagram. A read cycle T includes two read phases: a pre-charge phase t_(pre) and a read-out phase t_(R). During the pre-charge phase t_(pre), all address lines 8 a-8 h, 4 a-4 h in the OTP array 10 are charged to a pre-determined voltage (e.g. an input bias voltage V_(i) of the amplifier 30). During the read-out phase t_(R), all bit lines 4 a-4 h are floating. The voltage on a selected word line (e.g. 8 a) is raised to the read voltage V_(R), while voltage on other word lines 8 b-8 h remains at the input bias voltage V_(i). After this, the selected word line 8 a starts to charge all bit lines 4 a-4 h through the OTP cells 1 aa . . . and the voltages on the bit lines 4 a-4 h begin to rise. The multiplexor 40 sends the voltage on each bit line (e.g. 4 a) to the amplifier 30. When this voltage exceeds the threshold voltage V_(T) of the amplifier 30, the output V_(O) is toggled. At the end of the read cycle T, the states of all OTP cells 1 aa-1 ah in the OTP-cell set 1 a are determined.

FIG. 4D shows the current-voltage (I-V) characteristic of a preferred quasi-conductive layer. Because the V_(T) of the amplifier 30 is relatively small (˜0.1V or smaller), the voltage changes delta(V) on the bit lines 4 a-4 h during the above measurement are small, i.e. delta(V)˜V_(T). The reverse voltage on the unselected OTP cells (e.g. 1 ca) is ˜V_(T). As long as the I-V characteristic of the quasi-conductive layer satisfies I(V_(R))>>I(−V_(T)), the 3D-OTP_(V) would work properly even with leaky OTP cells.

To facilitate address decoding, vertical transistors are formed on the sidewalls of the memory holes. FIGS. 5A-5C disclose a third preferred 3D-OTP_(V) 10 comprising vertical transistors 3 aa-3 ad. The vertical transistor 3 _(aa) is a pass transistor comprising a gate 7 a, a gate dielectric 6 a and a channel 9 a (FIG. 5A). The channel 9 a is formed in the semiconductor material filled in the memory hole 2 a. Its doping could be same as, lighter than, or opposite to that of the vertical address line 4 a. The gate 7 a surrounds the memory holes 2 a, 2 e and controls the pass transistors 3 aa, 3 ae (FIG. 5B); the gate 7 b surrounds the memory holes 2 b, 2 f and controls the pass transistors 3 ab, 3 af; the gate 7 c surrounds the memory holes 2 c, 2 g and controls the pass transistors 3 ac, 3 ag; the gate 7 d surrounds the memory holes 2 e, 2 h and controls the pass transistors 3 ae, 3 ah. The pass transistors 3 aa-3 ah form at least a decoding stage (FIG. 5C). In one preferred embodiment, when the voltage on the gate 7 a is high while the voltages on the gates 7 b-7 d are low, only the pass transistors 3 aa, 3 ae are turn on, with other pass transistors off. The substrate multiplexor 40′ is a 2-to-1 multiplexor which selects a signal from the bit lines 4 a, 4 e. By forming vertical transistors 3 aa-3 d in the memory holes 2 a-2 d, the decoder design could be simplified.

FIG. 6 discloses a multi-bit-per-cell 3D-OTP_(V). It comprises a plurality of OTP cells 1 aa-1 ah. In this preferred embodiment, the OTP cells 1 aa-1 ah have four states: ‘0’, ‘1’, ‘2’, ‘3’. The OTP cells 1 aa-1 ah in different states are programmed by different programming currents and therefore, have different resistance. The OTP cells 1 ac, 1 ae, 1 ah are in the state ‘0’. Being un-programmed, their antifuse layers 6 c, 6 e, 6 h are intact. Other OTP cells are programmed. Among them, the OTP cells 1 ab, 1 ag are in the state ‘1’, which have the largest resistance as the conductive filaments 11 b are the thinnest; the OTP cell 1 aa is in the state ‘3’, which has the smallest resistance as the conductive filament 11 d is the thickest; the OTP cells 1 ad, 1 af are in the state ‘2, which have an intermediate resistance as the size of its conductive filament 11 c is between those of 11 b and 11 d.

While illustrative embodiments have been shown and described, it would be apparent to those skilled in the art that many more modifications than that have been mentioned above are possible without departing from the inventive concepts set forth therein. The invention, therefore, is not to be limited except in the spirit of the appended claims. 

What is claimed is:
 1. A three-dimensional vertical one-time-programmable memory (3D-OTP_(V)), comprising: a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit; a plurality of memory holes through said horizontal address lines; an antifuse layer on and in contact with the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address lines in said memory holes and in contact with said antifuse layer; a plurality of OTP cells at the intersections of said horizontal and vertical address lines, wherein said horizontal and vertical address lines form a Schottky diode at a selected one of said OTP cells whose antifuse layer is in said low-resistance state; wherein said horizontal and vertical address lines are separated by said antifuse layer only.
 2. The 3D-OTP_(V) according to claim 1, wherein said horizontal address lines comprise at least a metallic material, said vertical address lines comprise at least a doped semiconductor material.
 3. The 3D-OTP_(V) according to claim 1, wherein said horizontal address lines comprise at least a doped semiconductor material, said vertical address lines comprise at least a metallic material.
 4. The 3D-OTP_(V) according to claim 1, wherein said plurality of OTP cells form a vertical OTP string.
 5. The 3D-OTP_(V) according to claim 4, further comprising a vertical transistor coupled to said OTP string.
 6. The 3D-OTP_(V) according to claim 5, wherein said vertical transistor is formed in a first portion of selected one of said memory holes, and said OTP string is formed in a second portion of said selected one of said memory holes.
 7. The 3D-OTP_(V) according to claim 1, wherein said OTP cells have more than two states, the OTP cells in different states having different resistance values.
 8. A three-dimensional vertical one-time-programmable memory (3D-OTP_(V)), comprising: a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit, said horizontal address lines comprising at least a metallic material; a plurality of memory holes through said horizontal address lines; an antifuse layer on and in contact with the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address lines in said memory holes and in contact with said antifuse layer, said vertical address lines comprising at least a doped semiconductor material; a plurality of OTP cells at the intersections of said horizontal and vertical address lines, wherein said horizontal and vertical address lines form a Schottky diode at a selected one of said OTP cells whose antifuse layer is in said low-resistance state; wherein said horizontal and vertical address lines are separated by said antifuse layer only.
 9. The 3D-OTP_(V) according to claim 8, wherein a vertical transistor is formed in a first portion of selected one of said memory holes, and said plurality of OTP cells are formed in a second portion of said selected one of said memory holes.
 10. The 3D-OTP_(V) according to claim 8, wherein said OTP cells have more than two states, the OTP cells in different states having different resistance values.
 11. A three-dimensional vertical one-time-programmable memory (3D-OTP_(V)), comprising: a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit, said horizontal address lines comprising at least a doped semiconductor material; a plurality of memory holes through said horizontal address lines; an antifuse layer on and in contact with the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address lines in said memory holes and in contact with said antifuse layer, said vertical address lines comprising at least a metallic material; a plurality of OTP cells at the intersections of said horizontal and vertical address lines, wherein said horizontal and vertical address lines form a Schottky diode at a selected one of said OTP cells whose antifuse layer is in said low-resistance state; wherein said horizontal and vertical address lines are separated by said antifuse layer only.
 12. The 3D-OTP_(V) according to claim 11, wherein a vertical transistor is formed in a first portion of selected one of said memory holes, and said plurality of OTP cells are formed in a second portion of said selected one of said memory holes.
 13. The 3D-OTP_(V) according to claim 11, wherein said OTP cells have more than two states, the OTP cells in different states having different resistance values. 